Vacuum System Controllers

Leybold’s vacuum system controllers provide control, monitoring, and integration of gauges, pumps, and sensors within vacuum installations. The range includes COMBIVAC CM controllers, GRAPHIX control units, IONIVAC controllers, TURBO.CONTROL i, & more, supporting both standalone and integrated system configurations.
These systems bring together gauges, pumps, and sensors into a unified interface, allowing clear visualization, signal processing, and coordinated control. When appropriately specified, they provide reliable system feedback and help maintain stable, repeatable performance in laboratory, semiconductor, coating, and industrial vacuum environments.

Vacuum System Controllers

14 Products found
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GRAPHIX THREE

230682V01

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GRAPHIX TWO

230681V01

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GRAPHIX ONE

230680V01

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COMBIVAC CM51D - RS232/485

230119V01

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COMBIVAC CM50D - RS232/485

230118V01

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ELEC CAB - 4m 7.5kW

ECMV06

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TURBO.CONTROL i

800100V0004

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DISPLAY ONE (EU / US)

230001

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IONIVAC IM 540

230100

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DISPLAY THREE (EU / US)

230025

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COMBIVAC CM52 - with RS232 / 485

230115

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COMBIVAC CM51 - Profibus

230111

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COMBIVAC CM51 - RS232/485

230110