Measurement, Leak Detection and Control
Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10-12 mbar/ 0.75•10-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.
Measurement, Leak Detection and Control
Category
Pressure Measurement Min..
- 100.00 Pa (8)
- 500.00 Pa (2)
- 1.000 10⁻⁷ Pa (69)
- 10.00 Pa (2)
- 1.000 Pa (8)
- 0.100 Pa (8)
- 1.000 10⁻² Pa (15)
- 1.000 10⁻³ Pa (7)
- 13.30 Pa (8)
- 0.050 Pa (27)
- 5.000 10⁻³ Pa (9)
Pressure Measurement Max.
- 133.00 Pa (8)
- 1330.00 Pa (8)
- 1.000 Pa (30)
- 13.00 Pa (7)
- 13300.00 Pa (8)
- 1.000 10⁵ Pa (39)
- 1.013 10⁵ Pa (34)
- 1.020 10⁵ Pa (2)
- 1.200 10⁵ Pa (9)
- 1.333 10⁵ Pa (8)
- 20000.00 Pa (2)
- 2.000 10⁵ Pa (8)
Pumping Speed
- 0.000 10⁰ m³/s (1)
- 3.000 10⁻³ m³/s (6)
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